ZYGO's ZMI-4004 is a high-performance displacement measurement interferometer board, the following is its function description:

High-precision displacement measurement: Using the optical signal emitted by the interferometer to calculate displacement, can provide sub-nanometer resolution, can achieve a displacement resolution of 0.15nm, suitable for position measurement applications requiring high accuracy, such as wafer positioning in semiconductor manufacturing, displacement control of nanoscale processing equipment, etc.

Multi-axis measuring capability: It belongs to the 4X04 series measuring board, which can provide 4 measuring axes, and can measure the displacement in multiple directions at the same time, which is very practical for systems requiring multi-dimensional accurate control and measurement, such as multi-axis linkage precision machining machine tools, and the calibration of six-degree of freedom nano-displacement table.

Both high speed and high precision: the maximum speed can reach ±2.55m/s, and the accuracy (σ) of 0.2nm can still be maintained under such high-speed movement, which can meet some application scenarios that require both fast movement and high precision measurement, such as electron beam lithography equipment for high-speed scanning.

Error compensation function: With the patented cycle error reduction option, it can automatically and seamlessly eliminate the inherent nonlinear errors common in DMI systems, ensure the highest measurement accuracy under various measurement conditions, and effectively improve the reliability and stability of the measurement.

Compatibility: Compatible with models such as the ZMI 7702, 7714 and 7724, these lasers are water-cooled for greater frequency stability and accuracy, and optical isolation protects the laser from the back reflection of the components in the interferometer system, providing more flexibility and convenience for system integration.

Good scalability: can be modularly added to the VME chassis, support expansion to up to 64 measuring axes, easy to expand the system scale according to actual application requirements, suitable for large complex precision measurement systems